CW150/200/300mm Temperature Calibration Wafer

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The Sigma Sensors Temperature Calibration Wafer offers unmatched accuracy and reliability in thermal verification. Designed for universal application across all 200 and 300 mm thermal chucks, it ensures the accuracy and documentary traceability of your equipment, combining accuracy, ease of handling and robustness.

Universal Compatibility – designed for universal application across all 200 and 300 mm thermal chucks
Full Automation Options – Windows 10/11-based software with options from semi-automated to fully automated calibration and verification
Durable and Shatter-Free – a unique two-layer design increases durability and longevity, and makes handling easier
Intuitive Comprehensive Logging – intuitive logging with temperature-time graphs, wafer maps, and reporting
Repairable – repairable construction for extended service life
ESD-protective housing – ESD-protective housing for safe handling

Applications

Thermal Chuck Calibration, Characterization, and Verification –
Wafer fabs, laboratories, and other research facilities –

Automation Options

Windows 10/11-based software with automated prober temperature control and controller offset update. Compatible with leading wafer probers and thermal chucks. Semi-automated and fully automated options available with optional output documentation and reporting.

Windows 10/11-based software – automated prober temperature control and controller offset update
Semi-automation – automated prober temperature control with manual offset update
Full automation – fully automated offset update and verification
Compatibility – compatible with leading wafer probers and thermal chucks including Accretech, ATT, ERS, MPI, Cascade, and more
Reporting – optional output documentation and reporting

Data Export / Networking

Multiple options for data visualization, export, and networking to meet your needs.

Data Visualization – temperature-time graphs and temperature maps; also available live on tablet or mobile device
Mathematical Functions – min, max, mean, median, and range for advanced data logging
Data Export – CSV, XLSX, PDF, JSON (others on request)
Networking – Bluetooth and WiFi standard

Standard Software

Manual operation with no reporting.

Time / temperature graph – real-time and saved
Sensor stats – min, max, mean, median, range
Wafer map – Visualization of temperature distribution across the wafer
Save file as CSV – Export data to CSV for further analysis

Automation Software

Manual Mode SAR; Semi-Automatic ACR via GPIB or other intelligent interfaces; Fully-Automatic AOC via Ethernet. Optional automated test reporting.

Manual Mode SAR (included) – any prober / thermal chuck; time / temperature graph; wafer map; automated test report
Semi-Automatic ACR – automated calibration routines via GPIB or other intelligent interfaces: Lot Calibration with check run, manual offset update, and verification run; In‑Situ calibration with offset application and acceptance at each step
Fully-Automatic AOC – newer OEM chucks (ATT v5, ERS AC3) via Ethernet: determine ramp and acceptance criteria, start fully automatic AOC, check temperatures, adjust and verify offsets, save measurements and generate report; shows min / max / median and range, denotes before/after
Note – availability depends on exact configuration; OEM software update (patch) may be required

Get Pricing and Options

Please inquire for options and pricing. Agents welcome.

Accuracy Options

Sigma Sensors offers different tiers of calibration and accuracy to help customers balance cost with their performance requirements.

Factory Spec

Typical accuracy 0.2 K with sensor-to-sensor <0.1K. This is the most cost-effective option for customers who can tolerate a lower accuracy. Certificate of conformity.

Factory Calibration

ISO9001:2015 calibration with certificate and data. Sensor-to-sensor accuracy <0.05 K and absolute accuracy 0.15 K. This is the best option for customers who need a higher accuracy but do not require an ISO/IEC 17025 accredited calibration.

Accredited Calibration

ISO/IEC 17025:2017 accredited calibration. Sensor to sensor <0.03K Absolute accuracy 0.1 K (0.2 K, k=2). Includes certificate and data.

Specifications Summary

Specification range for the CW temperature calibration wafer series. Exact specifications depend on purchased configuration.

Trait	Spec
Wafer Size	150mm, 200mm, 300mm, custom
Temperature Range	-40℃ to +150℃ / -60℃ to +200℃ / (-75℃ to +300℃)
Sensor Accuracy	0.05 K sensor-to-sensor, 0.1 K (0.2 K, k=2)
Resolution	0.01 K
Number of Sensors	5 / 9 / 17 / 25 / custom
Thickness	< 4.5mm
Hard-Shell Case Dimensions	(200mm) 460 x 375 x 96mm, (300mm) 520 x 410 x 110mm
Logger Dim. (mm)	5: 70x70x20; 10: 80x90x20; 20: 85x150x120; 30: 95x200x20
Operating System	Linux / Windows 10, 11
Networking	Bluetooth, WiFi standard
Power	5V USB-C, 2A
Data Export	CSV, XLSX, PDF, JSON (others on request)
Math Functions	min, max, mean, median, range

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